Elsevier

Sensors and Actuators A: Physical

Review

Design and applications of MEMS flow sensors: A review

Abstruse

There is an indispensable demand for fluid menses charge per unit and direction sensors in various medical, industrial and environmental applications. Likewise the critical demands on sensing range of flow parameters (such as rate, velocity, management and temperature), the properties of different target gases or liquids to be sensed pose challenges to the evolution of reliable, cheap and low powered sensors. This paper presents an overview of the piece of work done on pattern and development of Microelectromechanical system (MEMS)-based flow sensors in recent years. In spite of using some similar principles, various production methods, analysis strategies, and different sensing materials, MEMS period sensors tin exist broadly categorized into iii main types, namely thermal sensors, piezoresistive sensors and piezoelectric sensors. Additionally, some primal challenges and future prospects for the use of the MEMS period sensors are discussed briefly.

Keywords

Flow sensors

Bio-inspired sensing

Bogus hair cell

Piezoelectric

Piezoresistive

Hot-wire

Cited by (0)

Fatemeh Ejeian is a Ph.D. candidate in Nano-biotechnology at the Academy of Isfahan-Iran and Macquarie University. She received her M.Sc. degree in Cellular and molecular Biological science from University of Tehran, Iran. Her research interests include regenerative medicine, biomimetic cell culture substrates, and bio-inspired MEMS/NEMS sensors. She is currently working on designing particular geometrical patterned substrates for regulation of MSCs behavior.

Shohreh Azadi is a PhD candidate at AmirKabir University-Iran and School of Engineering Macquarie Academy. She received both her Bachelor and Principal caste in Biomedical Engineering at Tehran Polytechnic. During her written report, she joined Pasteur Institute and Stalk prison cell inquiry center in Tehran/Iran and worked on cancer cell mechanics. Her electric current research involves mechanical behavior of cancer cells and their migration and invasion ability using 3D microfluidic systems and fellow sensory systems.

Amir Razmjou received his PhD from UNSW 2012, Australia and has been spending more than a decade on teaching, research and evolution. He has accrued multidisciplinary skills to develop innovative technologies for biomedical and environmental applications. His surface architecturing skills using functional nanostructured materials alongside biofunctionalization take helped him to develop innovative nano structured membranes for desalination and h2o treatment, drug delivery systems, and biosensors.

Yasin Orooji is an associate professor College of Materials Science and Engineering science, Nanjing Forestry University. His field of interests are Biofouling mitigation and porous materials.

Ajay Kottapalli received his Grand.Sc. degree in Physics with specialization in Photonics in 2007. After on, he obtained an Chiliad.Tech. degree in Solid State Engineering from the Indian Institute of Technology, Madras, (IIT-M) India. He worked as an Applications Engineer in KLA Tencor Pvt Ltd and is trained in semiconductor wafer defect inspection in silicon valley California. In 2010, he started his Ph.D. studies at Nanyang Technological University (NTU) Singapore under the supervision of Prof. Miao Jianmin and Prof. Michael Triantafyllou. During his Ph.D., His Ph.D. thesis is on the development of biomimetic ultra sensitive NEMS catamenia sensors inspired by the ingenuity of the neuromast sensors in the bullheaded cavefish. His research interests include biomimetics, bio-inspired MEMS/NEMS sensors, soft-polymer sensors, biomaterials, nature-inspired sensors, piezoelectric actuators, etc.

Majid E. Warkiani is a Senior Lecturer in the School of Biomedical Engineering, UTS, Sydney, Australia. He received his Ph.D. in Mechanical Engineering from Nanyang Technological University (NTU) and undertook postdoctoral grooming at Massachusetts Institute of Technology (SMART centre). He is also a member of Institute for Biomedical Materials & Devices (IBMD) and Heart for Wellness Technologies (CHT) at UTS. Dr Warkiani's electric current research activities focus on three fundamental areas of (i) Microfluidics involving the design and evolution of novel microfluidic systems for particle and cell sorting (e.g., circulating tumor cells, fetal cells & stalk cells) for diagnostic and therapeutic applications, (ii) Bio-MEMS involving the fabrication and label of novel 3D lab-on-a-chip systems to model physiological functions of tissues and organs, and (iii) 3D Printing involving the design and development of novel miniaturized systems (e.g., micromixers, micro-cyclones) for bones and applied research.

Mohsen Asadnia Dr. Mohsen Asadnia is a senior lecturer in Mechatronics-biomechanics and an ARC DECRA Fellow at Macquarie University. Prior to this, he was a research associate at the University of Western Australia, and earlier this a postdoctoral research boyfriend at the Massachusetts Institute of Technology (Singapore-MIT Alliance for Inquiry and Engineering science Heart). He received his PhD caste in Mechanical Engineering from Nanyang Technological University-Singapore. He has received over $2m research funding from the Australian Research Council (DECRA and LIEF), the Australian Academy of Science (regional collaboration program) and the National Research Foundation Singapore. He is a pioneer in the use of piezoelectric materials in MEMS chemic and concrete sensors for biomedical applications, and his inquiry group continues to break new ground in this cutting-border expanse of inter-disciplinary chemical science, auditory haircells and microfluidics.

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